Mass Flow Controller
ควบคุมอัตราการการไหลของแก๊ส
1000 Series
Features
● It is an analog model specializing the basic functions of the mass flow controller.
● Improved performance and reliability by basic functions pursuing original technology.
● Two type of Control Power Supply, Floor-standing "PA01" and Panel Mount "PA01P".
● Compact size.
● The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
● Input & Output Signal ： Analog (0～5VDC)
● To control the mass flow controller, a control power supply and a signal cable are required.
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Product Catalog
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C1005・1020/M1005・1020 (F.S.10SCCM～20SLM）
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C1030・1050/M1030・1050 (F.S.30～50SLM)
C1100 (F.S.100LM)
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Specification
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Mass Flow Controller |
C1005 |
C1020 |
C1030/C1050 |
C1100 |
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Mass Flow Meter |
M1005 |
M1020 |
M1030/M1050 |
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Flow range (N2equivalent) |
10,20,30,50,100,200,300,500SCCM
1,2,3,5SLM |
10,20SLM |
30,50SLM |
100LM |
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Gases |
Various Gases (Please consult about corrosive gas) |
Air, N2, Ar, H2, CO2, O2, He |
Air, N2 |
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Valve type |
NO : Normally Open (Excluding Mass Flow Meter) |
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Flow rate control range |
5-100％ F.S (Excluding Mass Flow Meter) |
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Accuracy |
±2％ F.S (Accuracy guaranteed between 15-35℃) |
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Setting signal |
0.25-5VDC (excluding Mass Flow Meter) |
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Output signal |
0-5VDC |
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Repeatability |
±0.2％ F.S |
±0.5％ F.S |
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Response |
≦6sec |
≦15sec |
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Operating differential pressure |
50-300KPa |
200-300KPa |
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Pressure resistance |
1MPa(G) |
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Operating temperature |
5-50℃, ≦85％RH (Scope of accuracy guarantee : 15-35℃) |
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Leak integrity |
1×10-7Pa･m3/sec He |
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Mounting attitude |
Free |
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Drive power source |
+15VDC：60mA、-15VDC：150mA |
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Communication |
Analog : 0-5VDC |
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Wetted surface material |
SUS316L, PTFE, Fluoro-Rubber |
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Seal material |
Fluoro-Rubber |
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Actuator system |
Thermal (excluding Mass Flow Meter) |
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Surface treatment |
Machined finish |
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Standard fitting |
1/4in.SWL (equivalent), One-touch fittings, ※ For other fitting, please contact us. |
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Accessory |
User's manual, Written guarantee |
External Dimensions
Ordering
Control power supply｜Product Catalog
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● To control the mass flow controller, a control power supply and a signal cable are required.
● It is a control power supply unit that controls the mass flow controller.
● Can be used with AC85-260V.
● Setting signals and output signals can be displayed by switching the switches.
● There are 2 types of panel mount type and floor stand type.
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■Which type would you like?■
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【PA01PS (panel mount type)】
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【PA01S (floor stand type)】
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■Scaling display (Set as full scale)
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▼ ［PA01PS］ Catarog Download
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▼ ［PA01P］ Catarog Download
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Signal cable
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Signal cable connecting mass flow controller and control power supply.
【standard】
① SC01 : 1m
② SC02 : 2m
③ SC03 : 3m
Other than the above, please contact us. |
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